Abstract

The authors report an 80 Gbit/s 2:1 selector-type multiplexer IC using InAlAs/InGaAs/InP HEMTs incorporating a high speed double-layer interconnection process with a low-permittivity insulator. The record operating data rate was measured on a 3 in wafer. In spite of the bandwidth limitation on the measurement setup, clear eye patterns were successfully observed for the first time.

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