Abstract
With rapidly growing threatens of bird flu and other diseases, there are strong interests in developing battery-free high-sensitivity thermometer for application in wireless sensor network-based animal-health monitoring system. We proposed new 3-D bimorph structure that enables passively digital sensing actuated by event-driven on/off mechanism. Tens and more such 3-D bimorphs are fabricated on a common substrate forming a micro thermometer. The array configuration potentially could have the sensitivity of 0.1℃ and even better. It also enables high fabrication yield and makes the package simplified. This paper would present the fabrication details and the related experimental results.
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