Abstract
This paper presents a single antenna platform steered by an external magnetic field where a monolithic microwave integrated circuit (MMIC) and capacitors are vertically integrated. Unique process skills are successfully optimized to implement a newly proposed microelectromechanical systems antenna. A silicon grid is patterned on the processing wafer to prevent the destruction of the antenna by benzocyclobutene delamination due to the stress applied to the wafers. Moreover, the stress barrier patterns are designed to increase the fabrication yield by protecting the structure failure during the back-side silicon release step. All the electrical elements, such as the MMIC, capacitors, patch antenna, and signal lines, are integrated on a single silicon chip; thus, the fabricated antenna system has smaller size and higher productivity than the conventional ones. The vertically integrated MMIC particularly results in a uniform gain at entire steering angles and reduced signal losses. The fabricated antenna is driven by a magnetic field externally applied with copper coils, and the antenna beam patterns are obtained with various tilting angles. The scanning angles are -14°, 0°, and +18° in the H-plane and -18°, -12°, 0°, +12°, and +16° in the E-plane, and the center frequency of the fabricated antenna is 59.8 GHz which is close to the designed resonance frequency of 60 GHz.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
