Abstract
We implanted 57Fe with 5x1016 ions/cm2 into SnO2 films containing 0.1% Sb and 3% Sb at the substrate temperature of 500°C in vacuum. As a result, four kinds of subspectra were observed in the depth selective CEM spectra by using a back scattered type of gas counter. Two doublets are assigned to paramagnetic Fe3+ Fe2+ species and two sextets are assigned to site A and site B of magnetite. Magnetite formation was found to prefer the top layer, whereas paramagnetic Fe2+ species were included in the deeper layer of the films. SnO2 (with 0.1% and 3% Sb) films doped with 5x1016 57Fe ions/cm2 at 500°C and post-annealed at 400°C for 6 h showed bulk ferromagnetism at room temperature although the 57Fe implanted SnO2 (3% Sb) film showed smaller Kerr effect than the 57Fe implanted SnO2 (0.1% Sb) film. This phenomenon was attributed mainly to the amount of magnetite in the as prepared samples and to the maghemite in the post-annealed samples, respectively, in addition to magnetic defects.
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