Abstract
The sputtering yield of molybdenum and angular distribution of sputtered molybdenum under oxygen exposure have been measured for D+- and He+-irradiation in the energy region from 2.5 keV to 6 keV at temperatures ranging from ambient room temperature to 640°C. The components of the sputtered particles from oxygen-exposed molybdenum have also been measured for 8 keV Ar+-irradiation at temperatures of 25°C and 485°C. The yields were determined from the weight loss of the targets and by the aid of the collector method which was applied to determine the angular emission distribution. Components of the sputtered particles were determined by means of the mass analysis of emitted neutral and charged particles. It was found that the oxygen exposure dependence of the yield strongly depends on the incident ions and on the temperature. The results are interpreted in terms of the chemical reactivity of the incident ions with oxygen, a dilution of metal atoms in the oxygen-exposed surface and a beam-induced desorption of Mo-oxide molecules.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
