Abstract
The Ni-Mn-Ga films were deposited on a poly-vinyl alcohol substrate with a radio-frequency magnetron sputtering apparatus using Ni_<50>Mn_<25>Ga_<25> and Ni_<52>Ga_<24> targets. After separating from the substrates, the films were annealed at several temperatures for 3.6ks. The chemical composition of the films depended on the radio-frequency generating power, however, there was no dependence on the heat treatment temperature. Each deposited film has a columnar grain structure. After heat treatment, the width of columnar grains widened and then became indistinct with increasing heat treatment temperature. At more than 1073 K, the precipitation of MnO was observed clearly. The films showed he most crystallinity at 1073 K. The martensitic transformation temperature increased with increasing nickel content of films, while the Curie temperature decreased. The film obtained at 200 W using the Ni_<52>Mn_<24>Ga_<24> target after heat treatment at 1073 K showed one-way shape memory effect through the reverse martensitic structural transformation during heating.
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