Abstract
We have developed a "Nano-Precision Machining System" which machines have produced metal die for ultra precision micro lens and liquid crystal optical wave guides etc. The developed machine is mainly composed of the high stiffness machine frame, NC controller, air hydrostatic spindles and supporting devices such as oil tanks and temperature control units. The machine has 6 axes. Three linear axes (X, Y and Z-axes) can be controlled at a feeding resolution of 1 nm under full closed feedback. The maximum workpiece size is 220 mm × 170 mm along the X and Y axes. In this paper, the concept of the "Nano-Precision Machining -System" are proposed and introduced. The system configuration, features, and specifications were described.
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