Abstract

This volume includes selected papers from MME 2017 – the 28th Micromechanics and Microsystems Europe Workshop. MME dates all the way back to 1989, when 25 participants gathered to hear about trends in the new and emerging field of microsystems technology in Twente, The Netherlands. In 2000, MME was held in Uppsala for the first time, and, seventeen years on from that gathering, we were delighted to welcome MME back to us.Forty high quality submissions were accepted for the conference from authors affiliated to 13 countries and a selection of those are collected here. The works span all aspects of MEMS and microsystems technology, including design and fabrication, simulation and modelling, experimental evaluation, and commercial translation.We acknowledge the important contributions made by our four invited speakers, who discussed exciting recent developments and their future visions for microsystems technology.Our conference Gala Dinner was held at Norrlands nation, one of the typical old student clubs of Uppsala. With the strong investments in new facilities, Uppsala University is both the oldest and the newest University in Sweden, and ranked the highest of the comprehensive Universities of our nation. Being in the cradle of Sweden and an old University City, unique cultural treasures and an exciting history can be found in this city of knowledge and inspiration. Uppsala has retained its small-town charm while offering a big city’s selection of shops, restaurants and other entertainment.Uppsala University has received generous support from industrial partners and the Institute of Physics. We sincerely thank them for their assistance with the hosting of MME 2017.Many thanks also to the Programme Committee, our Local Organizing Committee for their assistance with event logistics, and to the management and staff of Academic Conferences.We hope that you will enjoy this Proceedings, and look forward to seeing you in Uppsala, Sweden, for MME 2017.Klas Hjort and Maria TenjeLocal Co-Chairs – MME 2017

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