Abstract

The present study denotes the vibration suppression method by an ultrasonic linear motor composed of piezoelectric element. Various vibration suppression methods by using piezoelectric element have been proposed previously. For example, some methods induce opposite phase vibration to a vibration control object by piezoelectric element to counteract the vibration. Other methods suppresses the vibration by changing vibration into electrical energy with piezoelectric element. However, the former needs complicated control, feedback system and so on. The latter does not always have enough efficiency. Thus, this study examines a simple vibration suppression method. The method contact a tip of an ultrasonic linear actuator composed of piezoelectric element discontinuously on the surface of a vibration control object in the perpendicular direction of its vibration. Previously, one of the authors has confirmed that discontinuous contacts by the ultrasonic vibration of a linear motor can suppress the vibration. This study examines the condition to occur such phenomena and evaluates its effect by a cantilever equipment with various conditions.

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