2123 金属ガラスの超塑性鍛造によるマイクロインダクターの開発(S29-1 マイクロ/ナノ加工の動向と可能性(1),S29 マイクロ/ナノ加工の動向と可能性)

Abstract

We designed and fabricated a micro-inductor that may be used for hybrid electric circuits such as those in a mobile phone. The component was fabricated by superplastic die-forging of Pt-based metallic glass. This material exhibits Newtonian viscous flow in the supercooled liquid temperature range between the glass transition and the crystallization point. The working temperature was 543K, so a polyimide film was selected as a die material due to its good mechanical properties at elevated temperatures and its precision machinability. The die was fabricated with an excimer laser micro-machining system using the image-projection method. Laser ablation machining was carried out using a photomask in the shape of the micro-inductor. The photomask was fabricated using a lithography system. Superplastic die-forging of the metallic glass was carried out using this die, and micro-structures of the micro-inductor were easily fabricated. These fabrication processes demonstrate the advantages of metallic glasses and superplastic microforming techniques for mass producing micro/nano machine parts or devices.