Abstract
Impedance humidity sensor has attracted much attention due to its high sensitivity, simple structure, convenient preparation, low cost, and compatibility with integrated circuit technology, which has become one of the main types of commercial sensors. Zinc oxide (ZnO) is a typical metal oxide semiconductor (MOS) material, which has been widely used in humidity sensors because of their excellent surface-to-volume ratio, high surface reactivity, high catalytic efficiency, and strong adsorption capabilities. This chapter introduces the humidity measurement systems, humidity sensor characteristics, and sensing mechanism of the MOS impedance humidity sensor. Furthermore, some representative impedance humidity sensors based on ZnO will be discussed to analyze the factors that affect the performance of impedance humidity sensor. Large specific surface area, abundant surface oxygen vacancies, and good hydrophobicity are the key factors to improve performance of the impedance humidity sensor.
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