Abstract
This chapter briefly describes electron backscatter diffraction (EBSD) for crystal orientation mapping in the scanning electron microscope (SEM) and precession electron diffraction (PED) for crystal orientation mapping in the transmission electron microscope (TEM). The procedure for extraction of relative grain boundary energy and the grain boundary plane distribution of <111> tilt boundaries from the EBSD crystal orientation maps of a micrometric fiber-textured Al film is detailed. Grain boundary character distribution in nanometric Cu films is extracted from two-dimensional PED-TEM crystal orientation maps using stereological analysis. The importance of the frame of reference in crystal orientation mapping studies is discussed.
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