Abstract
The water flow was supplied from a nozzle on a rotating disk and the droplet formation process on the disk was investigated experimentally for the fundamental study of the water-mark formation in CMP process. The rotating disk was made by an acrylic resin Formation processes of the droplets and water were observed by usmg a high speed video camera. As a result, it was found that the several patterns of water flow appeared on the rotating disk. And the patterns strongly depended on the rotation speed and contact angle of the liquid
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
