Abstract
Self‐aligned a‐IGZO coplanar TFTs have high mobility, excellent large‐area uniformity, and are structurally free of parasitic caps. Accordingly, it is being adopted and mass‐produced as the backplane of OLED TV. Currently, the scope of application of OLED displays using oxide TFT backplanes is expanding to high‐resolution monitors for gaming. With this expansion, not only the size of the TFT but also its storage capacity has become an important factor in terms of aperture ratio. Instead of using a thick Passivation (PAS) Layer for storage capacity, we developed a structure that maximizes the aperture ratio by using a thin gate insulator (GI). However, GI capacitance must be used as the gate electrode and active layer electrode, but in self‐aligned coplanar structure, the active layer overlapping the gate metal is not conductive. To solve this problem, we succeeded in developing a 27‐inch QHD OLED monitor product for gaming by applying a self‐aligned coplanar structure/process that allows the active layer to simultaneously configure channels and wiring, and controlling degradation of channel characteristics.
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