1166. To the problem of dielectric relaxation in two-layer dielectric SiO 2TiO 2: S A Akulinin et al,coll of papers on semicond materials, dev and their applic, Voronezh 1973, 8–11 ( in Russian)

Abstract

A technique for generating active species with the one atmosphere uniform glow discharge plasma (OAUGDP) has been developed and tested in a wide range of potential plasma processing applications, including the sterilization and decontamination of surfaces. The OAUGDP is a non-thermal plasma with the classical characteristics of a low pressure DC normal glow discharge that operates in air (and other gases) at atmospheric pressure. In addition to directly exposing webs and workpieces to active species by immersion or at the plasma boundary of a parallel-plate reactor, we have shown that active species capable of sterilization can be convected at near room temperature to a remote exposure chamber. No vacuum system or batch processing is necessary, and a wide range of applications can be accommodated. This technology is simple, cost-effective and suitable for online treatment of webs and such three-dimensional workpieces as medical instruments. We will report the use of an air OAUGDP to sterilize a broad range of microorganisms on a variety of surfaces, and in several distinct applications. These include a remote exposure reactor to sterilize large workpieces 20 cm or more from the plasma-generating region, and a sterilizable air filter.