Abstract
Electrochemical micromachining (EMM) is a potential process to fabricate microcomponents that are stress free and have good surface finish. The process differs from conventional electrochemical machining in view of small interelectrode gap and ultrashort pulses and the larger significance of electric double layer in precise material removal. A comprehensive understanding of the fundamental principles with a focus on charge kinetics in the interelectrode gap, current distribution, electric double layer and processing parameter effects are elucidated. The evolution of hybrid EMM processes along with the recent innovations like solid-EMM and scanning tunneling microscope-based EMM for nanomachining is discussed. Lastly, directions for future research in EMM and recommendations for their applications is included.
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