Abstract
This chapter discusses semiconductor-based chemical microsensors. It defines chemical sensor as a device that transforms chemical information, ranging from the concentration of a specific sample component to total composition analysis, into an analytically useful signal. The detection of molecules or chemical compounds is an analytical task to obtain qualitative and quantitative time and spatially resolved information on specific chemical components. Qualitative information include information about the presence or absence of certain odorant, toxic, carcinogenic, or hazardous compounds, whereas quantitative information include information about concentrations, activities, or partial pressures of such specific compounds exceeding a certain threshold-limited. All this information can be obtained from either a chemical analysis system or, alternatively, by using chemical sensors. In both cases, sampling, sample pretreatment, separation of the components, and data treatment are the tasks to be fulfilled. The chapter illustrates the main components of a state-of-the-art chemical analysis or sensor system. A typical chemical sensor is a cheaper, smaller, and less complex device compared to miniaturized analytical systems.
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