Abstract
This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The <TEX>$1.2{\mu}m$</TEX> and <TEX>$0.4{\mu}m$</TEX> thick polycrystalline 3C-SiC cantilever and doubly clamped beam resonators with <TEX>$60{\sim}100{\mu}m$</TEX> lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at temperature range of <TEX>$25{\sim}200^{\circ}C$</TEX>. The TCF(Temperature Coefficient of Frequency) of 60, 80 and 100 On long cantilever resonators were -9.79, -7.72 and -8.0 ppm/<TEX>$^{\circ}C$</TEX>. On the other hand, TCF of 60, 80 and <TEX>$100{\mu}m$</TEX> long doubly clamped beam resonators were -15.74, -12.55 and -8.35 ppm/<TEX>$^{\circ}C$</TEX>. Therefore, polycrystalline 3C-SiC resonators are suitable with RF MEMS devices and bio/chemical sensor applications in harsh environments.
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