Abstract
The plasma processing is applied to many industrial fields as thin film deposition or surface treatment technique. In this study, we investigated large-area uniformed surface treatment of PET film at low temperature by using Scanning Plasma Method(SPM). Then, we measured difference and distribution of temperature on film`s surface by setting up a thermometer. We studied the condition of plasma for surface treatment by examining intensity of irradiation of uniformed plasma. And we compared contact angles of treated PET film by using Ar and plasma based low temperature. In our result, surface temperature of 3-point of treating is low temperature about , in other hands, there is scarcely any variation of temperature on film`s surface. And by using Ar plasma treatment, contact angle is lower than untreatment or plasma treatment. In case of PET film having thermal weak point, low temperature processing using SPM is undamaged method in film`s surface and uniformly treated film`s surface. As a result, Ar plasma surface treatment using SPM is suitable surface treatment method of PET film.
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