Abstract

Natural frequency of a nano-resonator via nano transfer printing is studied. Through a nano transfer printing, the hybrid metal/polymer membrane may evolve a wrinkle. Natural frequency of a wrinkled hybrid membrane decreases significantly, as the amplitude to wavelength ratio becomes larger. To address the design limit of a hybrid nano resonator, we perform parametric study using finite element analysis. Specifically, we study the effects of the Young's modulus ratio of the metal/polymer membrane, thickness ratio and wrinkle amplitude to wavelength ratio, respectively. The results from the parametric studies can serve as guideline to design hybrid nano resonators.

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