Abstract
A new hot-cathode ionization pressure gauge, called an ion spectroscopy gauge, which avoids errors due to electron-stimulated desorption (ESD) ions down to 10-12 Pa has been developed. The elimination of ESD ion errors is accomplished by combining three technical elements, a spherical grid ion-source, a spherical 180° energy analyzer, and reduction of desorption from a hot-cathode gauge. The X-ray limit of the new gauge is below 1.3×10-12 Pa with a sensitivity of 3×10-4 (A/Pa). Performance measurements of the new gauge have been carried out in a new aluminum XHV system and confirmed down to 2×10-11 Pa.
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