Abstract
The thin films are deposited on Pt electrode() using RF sputtering method at various deposition temperature. The deposition temperature of optimum was . SBN thin films were annealed at using furnace and RTA, respectively. The surface roughness showed about 2.42 nm in annealing temperature() of furnace. The capacitance density of SBN thin films were increased with the increase of annealing temperature. The maximum capacitance density of was obtained by annealing temperature(). The frequency dependence of dielectric loss showed about 0.03 in frequency ranges of 1~1,000 kHz.
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