밀폐형 공압회로 내 정밀압력제어를 위한 기계 구동식 가스 압력제어기의 제어특성 평가

Abstract

In this work, precise gas pressure control based on a closed pneumatic circuit was achieved with a mechanically driven gas pressure controller (MDGPC), consisting of a variable-volume bellows chamber and linear actuator. The linear actuator was employed to change an axial dimension of the bellows chamber with the proportional (P) and proportional-integral (PI) controls for fast, stable, and precise pressure control of the gas inside the bellows chamber. The pressure control stability and resolution of the MDGPC were approximately 1.5 Pa and 10 Pa for the P control and 1 Pa and 5 Pa for the PI control, respectively. Despite the more stable and precise control characteristics of the PI control method, overshoots and undershoots observed during the set-point pressure changes and recoveries from pressure disturbances rendered it unsuitable for the MDGPC control method. In contrast, the MDGPC operated under the P control did not show any significant overshoots or undershoots when the set-point pressure abruptly changed or when the MDGPC was exposed to pressure disturbances. Therefore, it was concluded that a fast, precise, and stable gas pressure control in a closed manner was attainable with the MDGPC under the P control.