Abstract
To acquire images in a thermionic-scanning electron-beam system, a scanning unit is needed to control the electron beam emitted from the tungsten filament source. In scanning the electron beam on the solid surface, the signalto-noise ratio depends on the scanning frequency. We used a digital filter to reduce noise by analyzing the real-time frequency of a secondary electron signal. The noise and the true image signal were well separated. We designed the digital filter via a DSP floating-point operation, and the noise elimination resulted in enhanced image quality in a highresolution mode.
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